Aperture |
20 mm |
30 mm |
50 mm |
波長選項 Wavelength Options |
UV: 355 nm |
CO2: 9.36 µm, 10.6 µm |
CO2: 9.36 µm, 10.6 µm |
典型處理型1 Typical Processing Speed1 |
50 rad/s |
50 rad/s |
18 rad/s |
重複性2 Repeatability2 |
<2 µrad | <2 µrad | <2 µrad |
解決命令 Command Resolution |
24-位(bit) |
24-位(bit) |
24-位(bit) |
注意:
除非另有說明,否則所有角度均為光學度數。
1.工作範圍和輸入孔鏡隨三鏡頭總成而異。
2.RMS、各軸。
All angles are in optical degrees, unless otherwise noted.
1. Work field range and input aperture varies with DFM.
2. RMS, per axis.